Design and Fabrication of Electrothermal Micromotors and Compliant Mechanisms for Spatial Parallel Micromanipulators
In this dissertation a new class of spatial micromechanisms employing compliant joints and electrothermal motors has been developed. The spatial micromechanisms contain three limbs driven by individual electrothermal linear motors to form multiple degree-of-freedom (DOF) manipulators. At the coaxial point of the