Packaging microelectromechanical systems (MEMS) frequently makes up about Eighty Pct of both the price and also the failures of the devices. For biological MEMS with microfluidic channels, packaging demands reliable fluid and electrical connections. This report explains different techniques for improving the
Investigation of ferroelectric and piezoelectric properties of ferroelectric films at nanoscale is not only of fundamental interest, but also critical to their applications as non-volatile ferroelectric memories and as microsensors and microactuators for microelectromechanical systems. Both intrinsic and extrinsic effects play a
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