This report shows the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in the Indium Phosphide and Silicon. We construct a tunable filter by putting one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam. This is actually
Modern control systems often consist of networks of components that must share a common communication channel. Not all components of the networked control system can communicate with one another simultaneously at any given time. The “attention” that each component receives is an
One important parameter in the study of dynamic systems is material damping. It is defined as the ability of a material to absorb vibration by internal friction and convert the mechanical energy into heat. In spite of its importance in the study