A computational toolbox was developed to perform full wafer response surface modeling of combinatorial chemical vapor deposition wafers. It consists of a library of MATLAB object-oriented functions that are based on accurate quadrature methods.,.
Author: Leon, Maria del Pilar
Source: University of Maryland
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Contents
1 Introduction
2 Response Surfaces
Least Squares Method
Analysis of Variance
Adequacy of the Model
Test of Hypothesis Concerning Individual Parameters
Model Comparison
Example
3 Response Surface Model computational toolbox
rsmodel
modelvalidate
modeloutput
getbcoeff
plotb
bttest
comptest
Additional Tools
waferpoint
plotsequence
xmlwrite
urlxmlread
Example
4 Artificially Generated Wafers Study
Single Point Analysis
Full second order behavior
Second order behavior
Third order behavior
Full Wafer Maps
Full second order behavior
Second order behavior
Third order behavior
5 Spatially Programmable CVD Reactor Study
Segments’ Center Point
Full second order model
Other models fitted
ivModel comparison
Full Wafer Maps
Full second order model
Other models fitted
Model comparison
6 Conclusions and Suggestions for Future Work
A Single Point Analysis Results for Segment 2 and Segment 3
Full Second Order Model
Other Models Fitted
Model Comparison
Predictions and Residuals
Bibliography